Application Fields
Applied to ultra-precision machining of surfaces and freeform surfaces of typical functional materials such as micro-prism retroreflectors, liquid crystal display brightness enhancement films, domes, gyroscopes, and optical glass. High-frequency ultrasonic vibration cutting technology can be configured.
Parameter Indicators
The travel of the X, M, and Z three axes is 350/120/350 mm.
Positioning accuracy of X/N/Z axes: 0.8μm/1.2μm/0.8μm (full stroke); repeat positioning accuracy: 0.6μm/1μm/0.6μm.
Spindle rotation error: 0.1μm
The straightness error of the X/M/Z axis is ≤ 0.5μm per 300mm.
The high-frequency ultrasonic vibration cutting frequency of the rotating axis is > 60kHz, and the positioning accuracy is ±1".
Processing Application Indicators
Achieve ultra-precision grinding of aspherical (freeform) surfaces with a diameter of φ240mm. The grinding accuracy of the component's surface shape PV (peak-to-valley) is ≤1.5μm, and the roughness Ra ≤100nm.