The five-axis CNC airbag polishing machine series serves as the conformal polishing process equipment for large-aperture optical component manufacturing complete production lines. Utilizing the most advanced high-precision and high-efficiency airbag polishing process and developed supporting control software, it can achieve ultra-precision polishing and material removal for planar, spherical, and aspherical surfaces of hard and brittle materials such as optical glass and ceramics. The material removal efficiency ranges from 0.1mm³/min to 300mm³/min, the maximum processable component size is φ2000mm, the surface shape accuracy PV ≤ 0.33λ (λ=632.8nm), and the surface roughness RMS ≤ 1nm.
Parameter Indicators
OXY/Z stroke: ≥ 2000mm×2000mm×800mm
A-axis stroke ±360°, B-axis stroke ±90°
Positioning error of XM/Z linear axis ≤6 μm, repeat positioning error ≤3 μm
Positioning error of A/B rotating axis ≤12", repeat positioning error ≤6"
Airbags: Specifications R40, R80mm, R160mm, R320mm
Air pressure: 0.01~0.3MPa
With in-situ tool dressing function, the shape accuracy of in-situ tool dressing ≤30 μm